Probe for scanning probe lithography and making method thereof
US7115863B1 · kind B1 · utility
5Cited by
9References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2000 |
| Grant date | Oct 3, 2006 |
| Priority date | — |
| Expiry date | Jul 13, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31759
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe of scanning probe lithography which provides a long time of useful life. The probe has a tip part comprising a conductor and an insulator, the insulator is formed to cover the conductor, and the conductor is formed to provide a substantially uniform cross-sectional configuration with respect to a surface to be patterned through scanning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.