Patent · US Expired

Multi-beam heterodyne laser Doppler vibrometer

US7116426B2 · kind B2 · utility

18Cited by
3References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 31, 2005
Grant dateOct 3, 2006
Priority date
Expiry dateOct 31, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01H9/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A multi-beam laser Doppler vibrometer simultaneously measures velocity, displacement, and vibration history of multiple locations on an object. A beam of coherent light is split into an object beam and a reference beam. The object beam is divided into a plurality of object beams to simultaneously illuminate multiple locations on the object under inspection. The reference beam is frequency shifted and split into a corresponding plurality of frequency-shifted reference beams. A portion of each object beam is reflected by the object as a modulated object beam. The plurality of modulated object beams are collected and respectively mixed with the plurality of frequency-shifted reference beams to provide a plurality of beam pairs. Each beam pair may be focused onto a photodetector or an optical fiber connected to a photodetector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.