High angular deflection micro-mirror system
US7116463B2 · kind B2 · utility
8Cited by
28References
25Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 15, 2004 |
| Grant date | Oct 3, 2006 |
| Priority date | — |
| Expiry date | Jul 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/145
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high angular deflection micro-mirror system including a substrate, a spacer structure extending from the substrate, a deformable membrane supported by the spacer structure, one or more supports located off center on the deformable membrane, and one or more mirrors on the support cantilevered therefrom to achieve a high angular deflection of the mirrors as the deformable membranes deform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.