Altering temporal response of microelectromechanical elements
US7119945B2 · kind B2 · utility
154Cited by
240References
35Claims
0Family size
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Key dates
| Filing date | Mar 3, 2004 |
| Grant date | Oct 10, 2006 |
| Priority date | — |
| Expiry date | Aug 3, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing actuation signals to be manipulated to activate elements with different pressure resistance at different levels of the actuation signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.