Polarizer for high-power deep UV radiation
US7119951B2 · kind B2 · utility
0Cited by
5References
65Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2004 |
| Grant date | Oct 10, 2006 |
| Priority date | — |
| Expiry date | Feb 8, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/3075
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A polarizing effect is achieved for light having wavelengths less than 250 nm by orienting an antireflector at an incidence angle between 65° and 75°. Despite limited choices for materials, the antireflector is constructed of layers that alternate in refractive index to exploit the mechanism of interference for limiting the reflectivity of one linear polarization component of the light. The same combination of layers supports the reflectivity of an orthogonal linear polarization component. The light reflected from the antireflector is highly polarized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.