Pressure sensor having a metal diaphragm responsive to pressure
US7121144B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2004 |
| Grant date | Oct 17, 2006 |
| Priority date | — |
| Expiry date | Dec 23, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/143
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor is composed of a cylindrical connector case firmly connected to a housing and a pressure-detecting chamber formed between the connector case and the housing. The pressure-detecting chamber is confined by a metal diaphragm, an outer peripheral portion of which is firmly held at a portion connecting the connector case and the housing. A relatively thick ring plate is connected to a mounting surface of the housing, and the outer peripheral portion of the metal diaphragm is sandwiched between the ring plate and a pushing plate placed on and connected to the ring plate. Thus, the pressure-detecting chamber containing a sensing element therein is surely sealed even if the housing is made of a material, such as aluminum, which is different from that of the metal diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.