Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method
US7121740B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2005 |
| Grant date | Oct 17, 2006 |
| Priority date | — |
| Expiry date | Aug 3, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/06745
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.