Molded fluoroelastomer with excellent detachability and process for producing the same
US7125598B2 · kind B2 · utility
5Cited by
5References
19Claims
0Family size
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Key dates
| Filing date | Apr 19, 2001 |
| Grant date | Oct 24, 2006 |
| Priority date | — |
| Expiry date | Jun 1, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24802
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
There is provided a fluorine-containing elastomer molded article which is obtained by irradiating the fluorine-containing elastomer molded article with a plasma and has a center line average roughness of not less than 0.65 μm or a fluorine-containing elastomer molded article which is obtained by applying a resin coating layer on a fluorine-containing elastomer substrate, has a small peeling strength and a small etching rate at the irradiation of plasma and is excellent in detachability and whiteness. There is provided particularly a molded article suitable as various sealing materials for semiconductor production apparatuses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.