Piezoelectric/electrostrictive film-type device
US7126255B2 · kind B2 · utility
13Cited by
7References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2005 |
| Grant date | Oct 24, 2006 |
| Priority date | — |
| Expiry date | Mar 24, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N9/36
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A piezoelectric/electrostrictive film-type device is provided which includes a ceramic substrate having a thin diaphragm portion and a peripheral thick portion, a lower electrode, an auxiliary electrode, a piezoelectric/electrostrictive film, and an upper electrode. The lower electrode, the auxiliary electrode, the piezoelectric/electrostrictive film, and the upper electrode are layered in that order on the ceramic substrate. The upper electrode has a length of 30 to 70% relative to the length of the thin diaphragm portion, and preferably has a width of 70% or more relative to the width of the thin diaphragm portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.