Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
US7126330B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2004 |
| Grant date | Oct 24, 2006 |
| Priority date | — |
| Expiry date | Oct 25, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/093
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated three-dimensional magnetic or any field sensing device and a method to fabricate an integrated three-dimensional magnetic sensing device is presented. An integrated three-dimensional magnetic sensing device comprises an apparatus that defines at least a first surface area and at least one sloped surface which is sloped with respect to the first surface area. Two magnetic sensing units could be arranged on the first surface area to provide first and second orthogonal sensing directions, and a third magnetic sensing unit could be arranged on the at least one sloped surface to provide sensing in at least a third sensing direction which is orthogonal to the first and second orthogonal sensing directions. Bias could be applied to the third magnetic sensing unit to cancel a component of the magnetic field sensed by the third magnetic sensing unit so that the third magnetic sensor unit only provides sensing in the third direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.