Patent · US Expired

Device for holding measurement instruments

US7126692B2 · kind B2 · utility

0Cited by

4References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Guenter Maul · Aalen, DE
Norbert Hubig · Gerstetten, DE

Key dates

Filing date	Dec 15, 2003
Grant date	Oct 24, 2006
Priority date	—
Expiry date	Oct 4, 2024

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T403/217
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A device for holding measurement instruments (2), in particular interferometers, is formed from a plurality of structure elements (4, 5, 6, 7) connected to one another and made from at least one material. The at least one material has a very low coefficient of thermal expansion α. The structure elements (4) on which the measurement instruments (2) are arranged are secured between at least two structure side parts (5) in such a way that the thermal expansions of the structure side parts (5) and of the connections (3) have no effect in the measurement direction of the measurement instruments (2).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.