Light modulator assembly
US7126741B2 · kind B2 · utility
98Cited by
5References
49Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2004 |
| Grant date | Oct 24, 2006 |
| Priority date | — |
| Expiry date | Oct 9, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A light modulator assembly includes a substrate, a micro-electro mechanical semiconductor device (MEMS device) formed on the substrate, and a temperature control device coupled to the substrate and configured to maintain the MEMS device at or above an elevated threshold temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.