Soller slit using low density materials
US7127037B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2003 |
| Grant date | Oct 24, 2006 |
| Priority date | — |
| Expiry date | Jul 25, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/025
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A Soller slit device is provided for collimation of high energy radiation, such as X-ray or EUV radiation, and has a low angle of divergence (less than 0.1°) and a high transmission efficiency (60 to 80% or greater). The Soller slit is made up of multiple, parallel blades of low-density material, such as glass, mica, or the like, which can be treated to reduce reflectivity. The Soller slit device of the invention advantageously provides an increased peak intensity and decreased peak width in diffraction patterns produced in high energy diffractometry applications, such as X-ray diffractometry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.