Patent · US Expired

Soller slit using low density materials

US7127037B2 · kind B2 · utility

5Cited by
19References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 25, 2003
Grant dateOct 24, 2006
Priority date
Expiry dateJul 25, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG21K1/025
  • WIPO fieldEngines, pumps, turbines
  • WIPO sectorMechanical engineering

Abstract

A Soller slit device is provided for collimation of high energy radiation, such as X-ray or EUV radiation, and has a low angle of divergence (less than 0.1°) and a high transmission efficiency (60 to 80% or greater). The Soller slit is made up of multiple, parallel blades of low-density material, such as glass, mica, or the like, which can be treated to reduce reflectivity. The Soller slit device of the invention advantageously provides an increased peak intensity and decreased peak width in diffraction patterns produced in high energy diffractometry applications, such as X-ray diffractometry.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.