Patent · US Expired

Method for structuring an oxide layer applied to a substrate material

US7129109B2 · kind B2 · utility

17Cited by

24References

28Claims

0Family size

Assignee

Shell Solar GmbH · DE

Inventors

Adolf Munzer · Selters (Westerwald), DE
Reinhold Schlosser · Birkenfeld, DE

Key dates

Filing date	Feb 1, 2002
Grant date	Oct 31, 2006
Priority date	—
Expiry date	Feb 28, 2022

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The invention relates to a method for structuring an oxide layer applied to a substrate material. The aim of he invention is to provide an inexpensive method for structuring such an oxide layer. To this end, a squeegee paste that contains an oxide-etching component is printed on the oxide layer through a pattern stencil after silk screen printing and the printed squeegee paste is removed after a determined dwelling time.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.