Vacuum ionization gauge with high sensitivity

US7129708B1 · kind B1 · utility

Assignees

• TSINGHUA UNIVERSITY · CN
• HON HAI PRECISION INDUSTRY CO., LTD. · TW

Inventors

• Peng Liu · Beijing, CN
• Yang Wei · Beijing, CN
• Lei-Mei Sheng · Beijing, CN
• Liang Liu · Beijing, CN
• Zhao-Fu Hu · Beijing, CN
• Cai-Lin Guo · Beijing, CN
• Pi-Jin Chen · Beijing, CN
• Shou-Shan Fan · Beijing, CN

Key dates

• Filing date: Jul 22, 2005
• Grant date: Oct 31, 2006
• Expiry date: Jul 22, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/62
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A vacuum ionization gauge (30) includes a cathode (31), an anode ring (33), a shield electrode (32), an ion educed electrode (34), a reflector (35) and a collector (36). The cathode is positioned corresponding to a first opening of the shield electrode, and the ion educed electrode is positioned corresponding to an opposite second opening of the shield electrode. An ion educed hole (341) is defined in a middle of the ion educed electrode. The reflector has a curving surface generally surrounding the second opening of the shield electrode. The collector is positioned at a center of the curving surface of the reflector and points toward the ion educed hole. The anode ring is positioned in the middle of the shield electrode. The vacuum ionization gauge is small volume and has low power consumption and improved sensitivity.