Common-path frequency-scanning interferometer
US7130059B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 19, 2003 |
| Grant date | Oct 31, 2006 |
| Priority date | — |
| Expiry date | Sep 2, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Frequency-scanning interferometry is applied to common-path interferometers for measuring topographical features of test objects. A reference element located adjacent to a test object functions as both a beamsplitter and a reference surface. A first portion of a measuring beam reflects from the reference surface of the reference element as a reference beam, and a second portion of the measuring beam transmits through the reference element to and from a surface of the test object as an object beam. Both beams are conveyed along a common path to a detector that records a plurality of intensity variations produced by constructive and destructive interference between localized portions of the object and reference beams associated with different transverse coordinates on the test object surface. An illumination frequency of the measuring beam is incrementally modified through a range of different frequencies sufficient to alternate the intensity variations between conditions of constructive and destructive interference, which occur at modulation frequencies sensitive to path length differences between corresponding points on the surfaces of the test object and reference element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.