Temperature sensor apparatus and method
US7131766B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2003 |
| Grant date | Nov 7, 2006 |
| Priority date | — |
| Expiry date | Aug 10, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K7/42
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A temperature sensor includes a membrane supported by a substrate and a circuit having elements for a substrate electrical resistance indicative of the temperature of a substrate and a membrane electrical resistance indicative of the temperature of a membrane. The substrate resistance and the membrane resistance are arranged in a bridge configuration to facilitate measurement of a differential voltage responsive to temperature change. The resulting temperature signal includes a first varying portion and a second varying portion. A controller receives a temperature signal from sensor, eliminates the second varying portion and generates a temperature value based on the based on the first varying portion. In this manner, the sensor provides an improved, fast response to changes in the surrounding temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.