MEMS optical switch with self-assembly structure
US7133185B2 · kind B2 · utility
4Cited by
29References
7Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 27, 2004 |
| Grant date | Nov 7, 2006 |
| Priority date | — |
| Expiry date | Aug 27, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A self-assembly structure of micro electromechanical optical switch utilizes residual stresses of three curved beams. The first curved beam pushes the base plate away from the substrate. The second curved beam lifts up the mirror slightly. Then, the third curved beam rotates the mirror vertical to the base plate and achieves self-assembly. In another embodiment, magnetic force and magnetic-activated elements are used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.