Method of manufacturing an optical system

US7133225B1 · kind B1 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Rolf Freimann · Aalen, DE
• Bernhard Fellner · Aalen, DE
• Hans-Guenther Sachs · Aalen, DE
• Hartmut Brandenburg · Lauchheim, DE
• Bernd Doerband · Aalen, DE
• Frank Schillke · Aalen, DE

Key dates

• Filing date: Oct 18, 2004
• Grant date: Nov 7, 2006
• Expiry date: Oct 18, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method of manufacturing an optical system comprises assembling an optical element on a mounting frame thereof. The mounting frame is disposed on a rotary table having an axis of rotation, and the mounting frame is adjusted such that a predefined axis of symmetry thereof is parallel to the axis of rotation. The optical element is placed on the mounting frame, and an interferometric measurement of a surface of the optical element is performed. The interferometric measurement is analyzed to arrange the optical element relative to the mounting frame such that a predefined axis of the optical element is parallel to the axis of rotation.