Micro-force sensing system
US7134349B2 · kind B2 · utility
1Cited by
5References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2004 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | Sep 29, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved microforce sensing system is provided. The microforce sensing system includes: a force sensor configured to detect a contact force exerted on a contact tip of the cantilever and operable to generate a signal indicative of the contact force, where the cantilever is constructed from a polyvinylidene fluoride material in the form of a substantially rectangular plate or other suitable shapes; and a processing circuit adapted to receive the signal from the force sensor and operable to determine the contact force exerted on the tip by integrating the signal from the force sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.