Piezoelectrically-activated cantilevered spatial light modulator
US7136215B1 · kind B1 · utility
6Cited by
19References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 2005 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | Jun 1, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A piezoelectric spatial light modulator including a substrate having an array of cavities and piezoelectric cantilevers is arranged on the substrate. Each of the piezoelectric cantilevers includes a base portion on the substrate and a beam portion extending over a respective one of the cavities. Each of the piezoelectric cantilevers further includes a first electrode, a second electrode and a piezoelectric element between the electrodes. A flexible layer covers the cavities and the piezoelectric cantilevers and reflective elements are each located on the flexible layer over a respective one of the beam portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.