Method and apparatus for beam deflection
US7136547B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2002 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | Jul 23, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/1828
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides a method and apparatus for directing a radiation beam (504, 606) in a desired direction. There is provided a movable member (10) supported for movement by a fixed member (40) and the movable member has an optical element, e.g a flat mirror (30) fixedly attached thereto. In one embodiment the mirror scans a radiation beam incident thereon in one plane. In a second embodiment, the radiation beam is scanned in two mutually perpendicular planes. A magnetic element (50) having a north and a south magnetic pole is fixedly attached to the movable member (10). A magnetically permeable stator element (70) that is stationary with respect to the movable member (10) and the magnetic element (50) is placed in the field of the magnetic element such that the stator element and said magnetic element mutually generate a magnetic traction force between them. A current coil (60) is wound around a portion of the stator element (70) and a current driver (400) is provided for driving a current in the current coil (60). The current induces an electromagnetic force in the stator element (70) and the electromagnetic force acts on the magnetic element (50) for controlling movement of …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.