Parylene capacitive accelerometer utilizing electrical fringing field sensing and method of making
US7137300B2 · kind B2 · utility
7Cited by
3References
9Claims
0Family size
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Key dates
| Filing date | Mar 10, 2004 |
| Grant date | Nov 21, 2006 |
| Priority date | — |
| Expiry date | Mar 10, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0857
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer device comprises a dielectric seismic mass separated by a gap from an underlying comb-shaped planar capacitor. The principle for measuring acceleration detecting capacitance change according to movement of the dielectric mass in the fringe electrical field. This measuring principle is verified by FEM simulation. The simple structure of the accelerometer device allows the polymer Parylene to be used as the proof mass, greatly simplifying the technology by requiring only surface micromachining. Prototype accelerometers are fabricated and calibrated with the aid of off-chip capacitive readout IC.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.