Bridged carbocyclic compounds and methods of making and using same
US7138550B2 · kind B2 · utility
2Cited by
2References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2004 |
| Grant date | Nov 21, 2006 |
| Priority date | — |
| Expiry date | Sep 15, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C2603/64
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Disclosed herein is a fluorinated bridged carbocyclic compound that can be polymerized by itself or with at least one other ethylenically unsaturated monomer to provide a polymer. The polymer may be used, for example, within a sub-300 nm photoresist composition. Also disclosed is a method to make the bridged carbocyclic compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.