Interferometric measuring device
US7139079B2 · kind B2 · utility
4Cited by
6References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 16, 2002 |
| Grant date | Nov 21, 2006 |
| Priority date | — |
| Expiry date | Dec 10, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/0209
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometric measuring device for measuring a surface or an interface of an object to be measured is provided. The effect of vibration on the measurement result is suppressed by providing a connecting unit by which at least one section of the measuring device assigned to the object to be measured is mechanically rigidly and detachably connectable directly to the object to be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.