Micro-structure gap control technology and structure formed therefrom
US7139110B2 · kind B2 · utility
0Cited by
3References
13Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 9, 2004 |
| Grant date | Nov 21, 2006 |
| Priority date | — |
| Expiry date | Jun 9, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0808
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A grating manufactured by a micro-structure gap control technique is provided in this invention. The grating includes a first structural part, a second structural part and a substrate. The first structural part includes a first micro-structure and a concavity, the second structural part includes a second micro-structure and an island structure located within the concavity, wherein a gap exists between the inland structure and the concavity. Further, the substrate is bonded to the first structural part and the second structural part for supporting the first structural part and the second structural part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.