Process for manufacturing a capacitive vacuum measuring cell
US7140085B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2003 |
| Grant date | Nov 28, 2006 |
| Priority date | — |
| Expiry date | Sep 23, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49224
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.