Relative pressure sensor

US7140256B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Karl Flögel · Schopfheim, DE
• Sergej Lopatiin · Bad Kötzting, DE
• Elke Schmidt · Bad Säckingen, DE
• Thomas Uehlin · Schopfheim, DE
• Olaf Textor · Bad Kötzting, DE
• Michael Hugel · Lörrach, DE

Key dates

• Filing date: Dec 22, 2002
• Grant date: Nov 28, 2006
• Expiry date: Dec 22, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/0654
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor for measuring a pressure difference between a pressure being measured and the ambient atmospheric pressure surrounding the pressure sensor, including a platform and a membrane loadable with a pressure being measured. The membrane is secured at its edge to the platform, with a pressure chamber thus being formed between the platform and the measuring membrane. The pressure chamber communicates over a reference air path with the atmosphere, with the reference air path being a winding path.