Gas flow measuring device and gas flow measuring method
US7140260B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2004 |
| Grant date | Nov 28, 2006 |
| Priority date | — |
| Expiry date | Oct 19, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/74
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention realizes (i) a gas flow measuring device which can measure a gas flow of a low-boiling gas in a mixed gas including two types of gasses having different boiling points, and (ii) a method of measuring a gas flow easily but highly precisely, using the gas flow measuring device. The gas flow measuring device includes a condensing tank for condensing a mixed gas in which two types of gasses having different boiling points are mixed with each other, and a flow meter for measuring the flow of the mixed gas. After condensing the mixed gas in the condensing tank so as to cause the gas flow of the high-boiling gas to be known, the flow is measured using the flow meter so that the gas flow of the low-boiling gas is worked out.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.