Integrated turbo/drag/regenerative pump with counter-rotating turbo blades
US7140833B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 4, 2004 |
| Grant date | Nov 28, 2006 |
| Priority date | — |
| Expiry date | Feb 27, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D23/008
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to vacuum pumps and a method for creating and maintaining a high vacuum. A vacuum pump includes a regenerative section and a turbo-molecular section. A common first rotor carries forward-rotating elements of both the regenerative section and the turbo-molecular section. Additionally, a second rotor carries counter-rotating elements of the turbo-molecular section. A first drive rotates the first rotor in a forward rotational direction while a second drive rotates the second rotor in a counter-rotational direction. The drives may be controlled to drive the common first rotor on start-up, and to later drive the second rotor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.