Porous gas sensors and method of preparation thereof
US7141859B2 · kind B2 · utility
32Cited by
17References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2005 |
| Grant date | Nov 28, 2006 |
| Priority date | — |
| Expiry date | Mar 30, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/128
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Devices including conductometric porous silicon gas sensors, methods of fabricating conductometric porous silicon gas sensors, methods of selecting a device, methods of detecting a concentration of a gas, and methods of analyzing data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.