Variable optical attenuator derived from sol-gel material and manufacturing method thereof
US7142766B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2004 |
| Grant date | Nov 28, 2006 |
| Priority date | — |
| Expiry date | Sep 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/48
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A variable optical attenuator and a method of manufacturing thereof are described. First, a bottom cladding is formed on a substrate. A waveguide structure having a core region and an attenuation region is subsequently formed on the bottom cladding by photolithography. A top cladding is then formed on the bottom cladding and the waveguide structure, and an electrode is next disposed thereon and is aligned above the attenuation region of the waveguide structure. Further, the waveguide structure is composed of a sol-gel material, which is obtained by mixing a solution of metal alkoxide with a solution of organically modified Si-alkoxide and heating the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.