CMP for corrosion-free CoFe elements for magnetic heads
US7144518B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Dec 11, 2003 |
| Grant date | Dec 5, 2006 |
| Priority date | — |
| Expiry date | Oct 17, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09K3/1472
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A method of manufacture of magnetic heads which include CoFe elements using CMP is presented. The method includes providing a slurry of Al2O3, adjusting the concentration of H2O2 in said slurry to within a range of 6–12% by volume and balancing mechanical polishing action. The balancing is done by adjusting the table speed of a mechanical polisher to within a range of 55–90 rpm, and adjusting polishing pressure to within a range of 5–7 psi. Also a magnetic head having elements made of CoFe material made by this method is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.