Circuit suitable for vertical integration and method of producing same
US7144757B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 19, 2000 |
| Grant date | Dec 5, 2006 |
| Priority date | — |
| Expiry date | Apr 19, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This invention relates to a vertically integratable circuit and a method for producing same.Unlike known methods for producing vertical electric connections, the present method uses process steps in the production of the vertically integratable circuit itself to permit vertical integration. This simplifies the sequence of production for vertically integratable circuits and thus the three-dimensional integrated circuit as a whole, thereby optimizing plant running times since process steps are saved. Because finished substrates are no longer the starting point for producing the vertical electric connections, an improved yield is moreover obtained since no process steps which could in particular change the already produced active circuit elements, such as steps with high process temperatures, are necessary any longer after production of the circuit elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.