Infrared bolometer
US7145141B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2004 |
| Grant date | Dec 5, 2006 |
| Priority date | — |
| Expiry date | Nov 5, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses an infrared bolometer including a signal bridge used for reading a resistance value varied by infrared heat and removing residual heat of a heat absorbing layer. The infrared bolometer includes a lower substrate having an integrated circuit coated with a protection layer, an upper substrate having an absorbing layer for absorbing infrared rays and a resistor whose resistance value is varied by the infrared heat absorbed by the absorbing layer and spaced apart from the lower substrate by a predetermined distance,a post for mechanically supporting the upper substrate and connecting the upper and lower substrate to each other, and a signal bridge arranged between the lower and upper substrates for transmitting a signal from the resistor of the upper substrate to the lower substrate. The infrared bolometer further includes a lower electrode formed on the top surface of the lower substrate for driving the signal bridge to be electrically connected/disconnected to/from the upper substrate, and a reflecting layer formed on the top surface of the lower substrate for increasing absorptivity of infrared heat.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.