Scanning magnetic microscope having improved magnetic sensor
US7145330B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 14, 2003 |
| Grant date | Dec 5, 2006 |
| Priority date | — |
| Expiry date | Mar 21, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0385
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning magnetic microscope SMM (20) includes a sensor (10) for sensing a magnetic field generated by a specimen (78), the sensor including one of a MTJ, a GMR, or an EHE sensor; translation apparatus (22A–C, 52) for translating the sensor relative to a surface of sad specimen; and a data processor (50), having an input coupled to an output of said sensor, for constructing an image of said magnetic field. The sensor preferably includes one to three sensing units each defining a sensing axis for sensing a component of a magnetic field from a specimen, the sensing units disposed such that the sensing axes are orthogonal to one another. Pluralities of such sensors can be disposed in two or three dimensional arrays. The SMM can be used for examining the current flow in ICs, electromigration, magnetic data storage media, biomagnetic systems and magnetic ink used to print currency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.