MEMS directional sensor system
US7146014B2 · kind B2 · utility
43Cited by
33References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 11, 2002 |
| Grant date | Dec 5, 2006 |
| Priority date | — |
| Expiry date | Nov 5, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R3/00
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS directional sensor system capable of determining direction from a microphone to a sound source over a wide range of frequencies is disclosed. By utilizing a parallel filter bank that relies on a slow wave structure in a MEMS device, such as described herein, a very small microphone, on the order of a few micrometers, can be designed with unsurpassed ability to detect a sound source location.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.