Piezoresistive strain concentrator
US7146865B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 23, 2006 |
| Grant date | Dec 12, 2006 |
| Priority date | — |
| Expiry date | Jan 23, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/141
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A piezoresistive device senses mechanical input and converts mechanical movement of at least two relatively movable parts into an electrical output. An SOI substrate is provided. A gap extends across a portion of the substrate. The gap defines the at least two relatively moveable parts and a flexible cross-section that connects the at least two relatively moveable parts. The cross-section is made of a same material as the substrate. At least one strain sensitive element is at a surface of the substrate. The at least one strain sensitive element has two end portions interconnected by an intermediate neck portion. The neck portion is supported on a structure that concentrates strain. The structure extends across the gap and has vertical walls extending to the cross-section in the gap. The structure is made of the same material as the substrate. At least one electrode is electrically connected to the end portions and is configured to detect changes in an electrical resistance between the end portions created when the neck portion is subjected to stress in a direction of a current through the at least one strain sensitive element that results from a relative movement of the at least tw…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.