Microfabricated microconcentrator for sensors and gas chromatography
US7147695B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 15, 2003 |
| Grant date | Dec 12, 2006 |
| Priority date | — |
| Expiry date | Sep 3, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2030/623
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Devices for enhancing the sensitivity of a microsensor or any other micro device by providing on-line preconcentration. Microconcentrators that can be integrated with a sensor or a micromachined GC to enhance the signal to noise ratio can include a miniaturized sorbent trap fabricated on a microchip. The microconcentrator can be made on a silicon substrate so that a sensor can be integrated on the same chip. The microconcentrator is composed of at least one microchannel lined with a microheater for in-situ heating. Preconcentration may be achieved on a thin-film polymeric layer deposited above the heater in the microchannel. Rapid heating by the channel heater generates a “desorption pulse” to be injected into a detector or a sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.