Patent · US Expired

Semiconductor package with getter formed over an irregular structure

US7147908B2 · kind B2 · utility

1Cited by
19References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 13, 2004
Grant dateDec 12, 2006
Priority date
Expiry dateOct 13, 2024

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31678
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A semiconductor package includes a substrate having a first surface portion in a cavity. The first surface portion includes an artificially formed grass structure. The package includes a getter film formed over the grass structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.