Micromechanical structural element having a diaphragm and method for producing such a structural element

US7148077B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Matthias Fuertsch · Gomaringen, DE
• Stefan Pinter · Reutlingen, DE
• Heribert Weber · Leverkusen, DE
• Frank Fischer · Mesa, US
• Lars Metzger · Albstadt, DE
• Christoph Schelling · Stuttgart, DE
• Frieder Sundermeier · Kornwestheim, DE

Key dates

• Filing date: Oct 19, 2004
• Grant date: Dec 12, 2006
• Expiry date: Oct 19, 2024

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0167
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.