Data storage module suspension system
US7148549B2 · kind B2 · utility
3Cited by
21References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2005 |
| Grant date | Dec 12, 2006 |
| Priority date | — |
| Expiry date | Sep 22, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B9/1418
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A micro-electro-mechanical device includes a moveable mass supported within a frame. To support the mass within the frame, a first flexure extends between the mass and the frame. An angle softening element is positioned between a first end of the first flexure and the frame to allow angular movement of the first flexure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.