Optical microcantilever
US7150185B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2004 |
| Grant date | Dec 19, 2006 |
| Priority date | — |
| Expiry date | Sep 24, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical microcantilever for a scanning near field microscope has an optical waveguide for propagating light. The optical waveguide has a longitudinal axis, a light input/output end, a free end opposite to the light input/output end, and a tip formed at the free end of the cantilever and having a microscopic aperture at an end thereof. A support section has a first portion supporting the optical waveguide, a second portion and a third portion. The second portion has an optical element guide channel formed in the support section for supporting an optical element acting on light entering the optical waveguide or on light exiting from the optical waveguide and for determining a position of the optical element. The third portion is disposed between the first portion and the second portion and has a surface disposed at an angle of inclination relative to the longitudinal axis of the optical waveguide. The light input/output end of the optical waveguide projects above the third portion for reducing a coupling loss between the optical element and the optical waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.