Dry passivation process for stamper/imprinter family making for patterned recording media
US7150844B2 · kind B2 · utility
12Cited by
7References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2003 |
| Grant date | Dec 19, 2006 |
| Priority date | — |
| Expiry date | Dec 8, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D1/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.