Vertically aligned nanostructure scanning probe microscope tips

US7151256B2 · kind B2 · utility

Assignee

• UT-BATTELLE, LLC · US

Inventors

• Michael A. Guillorn · Locke, US
• Bojan Ilic · Ithaca, US
• Anatoli V. Melechko · Oak Ridge, US
• Vladimir I. Merkulov · Knoxville, US
• Douglas H. Lowndes · Knoxville, US
• Michael L. Simpson · Knoxville, US

Key dates

• Filing date: Nov 19, 2003
• Grant date: Dec 19, 2006
• Expiry date: Dec 7, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q70/12
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An apparatus includes a cantilever structure including a substrate including a cantilever body, that optionally includes a doped layer, and a vertically aligned nanostructure coupled to the cantilever body.