Micromirror array device and a method for making the same
US7151628B2 · kind B2 · utility
1Cited by
1References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 19, 2005 |
| Grant date | Dec 19, 2006 |
| Priority date | — |
| Expiry date | Oct 19, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The spatial light modulator of the present invention comprises an array of micromirrors, each of which has a reflective deflectable mirror plate. A set of posts are provided for holding the mirror plates on a substrate, but not all micromirrors of the micromirror array have posts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.