Positioning apparatus
US7152331B2 · kind B2 · utility
12Cited by
14References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2004 |
| Grant date | Dec 26, 2006 |
| Priority date | — |
| Expiry date | Jan 22, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A positioning apparatus has a stage, guide elements provided on both ends of the stage, and drive elements which are provided at one of both ends of the stage and move the stage along the guide elements. Like linear guide rails 61A, 61B and linear guide bearings 23A, 23B, two guide elements are provided in an area where a ball screw shaft 52 serving as a drive element is placed. One guide element is provided in an area where a non-drive element is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.