Sensor for detecting a physical property between two movable bodies having high tribological strain

US7152484B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Klaus Meyer · Ditzingen, DE
• Julius Nemzov · Eßlingen, DE
• Ulrich Mueller · Hamburg, DE

Key dates

• Filing date: Sep 6, 2002
• Grant date: Dec 26, 2006
• Expiry date: Jan 16, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L5/0014
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor element (5) detects a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress. In certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30), in particular a sensor segment (13), is provided, which is separated from the body (10) by an insulation layer (12). The insulation layer (12) has at least two component layers (31, 32), wherein a first component layer (31) is a layer (31) with at least a low electrical conductivity in comparison to the sensitive layer (13) and wherein a second component layer (32) is a layer with a higher tribological stress capacity in comparison to the first component layer (31) with the comparatively low electrical conductivity and/or the insulation layer (12) is a layer that is at least essentially comprised of carbon, or contains carbon, oxygen, and silicon. The sensor element (5) proposed is primarily suited for detecting measurement variables in the contact region betw…