Surfactant-enhanced protection of micromechanical components from galvanic degradation
US7153440B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2002 |
| Grant date | Dec 26, 2006 |
| Priority date | — |
| Expiry date | Mar 6, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/053
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A microelectromechanical structure is formed by depositing sacrificial and structural material over a substrate to form a structural layer on a component electrically attached with the substrate. The galvanic potential of the structural layer is greater than the galvanic potential of the component. At least a portion of the structural material is covered with a protective material that has a galvanic potential less than or equal to the galvanic potential of the component. The sacrificial material is removed with a release solution. At least one of the protective material and release solution is surfactanated, the surfactant functionalizing a surface of the component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.