Acceleration insensitive piezo-microresonator
US7154212B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 5, 2005 |
| Grant date | Dec 26, 2006 |
| Priority date | — |
| Expiry date | Aug 20, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/177
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acceleration insensitive piezo-microresonator provides substantially reduced acceleration sensitivity with a plano—plano piezo-microresonator, upper gap and lower gap embedded in a rigid structural supporting member holding major surfaces of the piezo-microresonator firm and steady. The piezo-microresonator has neither electrodes on its surfaces nor contacts with any electrodes. Electrodes are doped regions incorporated into the support member. The upper and lower gaps are adjacent to the major surfaces of the piezo-microresonator, permitting it to vibrate freely. The support member surrounds and supports the plano—plano piezo-microresonator plate, upper gap and lower gap, maintaining a constant upper gap height and lower gap height. The electrodes provide a thickness-directed electrical field exciting the piezo-microresonator. A method of desensitizing a resonant frequency of a piezo-microresonator to acceleration stresses is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.